The system is composed by:
- Holding structure
- Automatic loading from cassettes ( manual loading also available)
- Automatic feeding unit from loading system to the worktable and then to a unit unloading
on stacks
- 150 W CO2 close tube laser source - equipped for superimpulse
- Computer Nunerical Control
- X-Y stages on aerostatic bearing pads, driven by linear motors with for high positioning accuracy - designed and produced by Baccini
- System for guiding and focusing of the laser beam
- Twin optics for scribing and cutting
- Workpiece holding stage with integrated holding function
- Optical centering device for the substrates using cameras and vision electronics
- Electric and electronic plant
- Pneumatic plant
- Laser beam cooling unit
- Air drying and filtering unit
- Dust exausting , filtering and collection unit
The technical features
| OPTICAL FEATURES: |
|
 |
| Laser |
sealed tube CO2 |
|
| Rated output power |
150 W |
|
| Energy distribution |
mostly tem oo |
|
| Beam diameter |
about 10 mm |
|
| Max frequency |
10 khz |
|
| Max. pulse width |
20 µm |
|
| Focusing system |
moving optics |
|
| MECHANICS FEATURES: |
|
|
| Working stroke |
max. 300 x 300
mm |
|
| X-y axes |
Baccini linear
motors and air bearings |
|
| Measuring system |
optical scales |
|
| Resolution |
0.2 µm |
|
| Accuracy |
± 5 µm |
|
| SCRIBING: |
10 sec |
|
| Distance between scribing
hole |
from 50 µm, adjustable
10 µm steps
(sincronized with tables speed) |
|
| Straightness |
± 10 µm on 100
mm |
|
| Repeatibility |
± 10 µm |
|
| Position accuracy |
± 5 µm |
|
| Penetration |
60% on 1.27 mm
thick substrates |
|
| CUTTING: |
|
|
| The line can automatically cut
(twin optics optional), with following features: |
|
| Circular openings |
diameter tolerance
+/- 10 µm
smallest diameter 20 µm |
|
| Rectangular openings |
+/- 25 µm tolerance
on the diagonal |
|
| These features are for
alumina substrates with 96% purity |
Line system control
Industrial personal computer with axis motion control cards
Operating system: "windows nt4" or "windows 2000"
Baccini machine control and user interface as well as diagnostic sw
Remote diagnosis
PCI 10/100 Mbps
TCP/IP Network Protocol
Rj-45 connector
Safety
The line is compliant with IEC 60825-1,2,4 European Spec. about laser safety and meets the requirements of the machine directive UNI EN 12626.
|
